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Oxford Instruments PlasmaPro Systems Bought for Chinese LED Manufacture

July16_OxfordHigh tech Chinese manufacturer, Enraytek Optoelectronics Co has recently ordered several leading edge Oxford Instruments PlasmaPro 800 PECVD systems for the manufacture of their High Brightness LEDs. Enraytek’s key products are High Brightness LEDs for TV backlighting and LED lighting, with manufacturing capability covering all aspects from sapphire substrate materials, epitaxial wafers, and chips for packaging and testing.

Oxford Instruments’ large capacity, open loading PlasmaPro 800 PECVD systems are industry proven for HBLED processes, allowing up to 300 mm wafers, and are designed to produce the high quality and uniform dielectric films needed in LED manufacture. The PlasmaPro’s small footprint, and substrate temperature control allows high performance processes and precise process control. The large electrode delivers the market leading cost of ownership demanded by the LED industry.

Says Mr.Xu Chunchao. Vice President from Enraytek, “As one of China’s foremost LED design and manufacturing companies, cost efficient and state-of-the-art processing equipment is key for Enraytek.  We chose Oxford Instruments systems following a rigorous selection process, as they could offer us the advanced technology, support and cost of ownership we require.”

“Oxford Instruments manufactures the very high specification plasma deposition technology required by the LED industry”, comments Dr David Haynes, Sales and Marketing Director at Oxford Instruments Plasma Technology, “With an already established installed base in Chinese LED companies, we are delighted that Enraytek has also chosen us as their supplier of a number of PlasmaPro 800 systems. We back up our installations with a comprehensive ongoing customer support.”

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